Description：PT-T1200 CVD is a tube furnace with 60mm diameter alumina tube, vacuum pump and four channels mass flow meters + one float flowmeter gas flowing system. It can mix 1-4 types of gases for CVD or diffusion.
|Part I: Standard Parts|
|Max. Temp.||1200℃ for limiting|
|Heating Rate||Suggestion: 0~10℃/min,max. 15℃/min|
|Temperature Zone||300mm + 300mm dual zones|
|Heating Element||Resistance wire|
|Temperature Control Accuracy||±1℃ ()|
|Tube Size||60 / 52mmx 1000mm (OD/ID x L)|
|Material: Quartz tube|
|Temperature Control||PID automatic control via SCR power control|
|Heating curves||30 steps programmable|
Stainless Steel vacuum flange.
One end of the flange has 2 barbed needle valves, with installed Mechanical Pressure Gauge.
Another end of the flange has a KF25 port with a barbed needle valve
|Power||220V, 50 Hz, single phase at max. 6KW|
|Vacuum Pump||Rotary Vane Vacuum Pump||
Ultimate vacuum 10-3 Torr.
Vacuum inside the tube is around 10-1 Torr.
(RM temp. And empty tube condition)
Flow rate: 2.6 L/S
(pump photo is only for reference, actual appearance depends on final desgin)
The rotary vane vacuum pump will be designed into a cart with wheel. With connection accessories
Digital vacuum gauge is included
3.8x10-5 to 1125 Torr measurement range
Anti-corrosive, gas-type independent
Customized Mass Flow Meters
(Seven Star Brand)
With LCD Touch Screen Controller
(Desigen by Kejia with Kejia logo)
One Float flowmeter + Four precision mass flow meters :
MFC Accuracy is: ±1.5% F.S.
MFC 1 for Nitrogen : Gas flow range from 0~100 sccm
MFC 2 for Hydrogen : Gas flow range from 0~100 sccm
MFC 3 for Methan : Gas flow range from 0~100 sccm
MFC 4 for Argon: Gas flow range from 0~100 sccm
MFC 5 for Oxygen: Gas flow range from 0~100 sccm
FFC 1 for Argon and nitrogen mixing gas: Gas flow range 0~100sccm
One gas mixing tank (for 5 MFC only) is installed on bottom case with 5 stainless steel needle valves is installed on left side of bottom case to control 5 type gases mixing manually.
LCD Touch Screen (designed by kejia, with Kejia Logo) for MFC is as below:
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.
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