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Model：PT-T1200-S60-CVD
Description：Product Name Low Vacuum CVD System Model KJ-T1200-S60-CVD Tube furnace part Furnace structure Double-layer shell structure
| Product Name | Low Vacuum CVD System |
| Model | PT-T1200-S60-CVD |
| Tube furnace part | |
| Furnace structure | Double-layer shell structure, equipped with cold air system, automatic cooling furnace shell temperature does not exceed 45 ℃ |
| Furnace Material | High-quality high-purity alumina polycrystalline fiber solidified furnace with vacuum adsorption molding technology from Japan. The material has good thermal insulation performance, high reflectivity, and balanced temperature field. |
| Max.Temperature | 1200℃ |
| Continuous working temperature | 1100℃ |
| Heating rate | Recommended ≤10°C/min, the fastest heating rate is 20°C/min |
| Furnace tube material | High purity quartz tube |
| Furnace tube size |
OD:60mm* ID:54mm * length 1200mm The instrument must be plugged in before use to prevent heat radiation |
| Heating zone length | 220+220+220mm |
| flange | Stainless steel sealing flange, easy to disassemble, precision needle valve is installed on the flange |
| Temperature Control System |
The temperature control system adopts artificial intelligence adjustment technology, with PID adjustment and self-tuning functions 1. Adopt PID method to adjust temperature control, and can set 30 heating and cooling programs 2. Temperature control accuracy ±1ºC 3. With over-temperature protection and burnout protection 4. The instrument has the function of temperature self-tuning |
| Heating element | Molybdenum alloy resistance wire |
| Temperature measuring element | K type thermocouple |
| Working power | AC220V，50/60Hz |
| Rated power | 5KW |
| Air inlet and outlet | The flange contains vacuum connection port, air inlet and outlet |
| Air system part | |
| Mass flowmeter |
Four-way precision mass flowmeter: digital display, automatic control of gas flow. MFC1 range: 0-500 sccm (range optional) MFC2 range: 0-500 sccm (range optional) MFC3 range: 0-500 sccm (range optional) MFC4 range: 0-500 sccm (range optional) Gas circuit: 4 channels |
| Vacuum system part | |
| vacuum pump | DRV10 rotary vane pump pumping |
Transaction process
After-sales Service
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.
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