Model:PT-TCVD1100-S60CK2
Description:The PT-TCD1100-S60CK2CVD system mainly consists of a 1200 degree dual temperature zone slide tube furnace, a high vacuum molecular pump vacuum system, a 6-channel mass flow meter gas supply system, and other connecting components; Fast cooling and heating of materials can be achieved by sliding left and right on the guide rail; Mainly used for conducting experiments and production related to vapor deposition in universities, research centers, and manufacturing enterprises.
The PT-TCD1100-S60CK2CVD system mainly consists of a 1200 degree dual temperature zone slide tube furnace, a high vacuum molecular pump vacuum system, a 6-channel mass flow meter gas supply system, and other connecting components; Six gas sources can be connected simultaneously, and the gas flow rate is accurately measured and controlled using a touchscreen 6-channel mass flow controller. Fast cooling and heating of materials can be achieved by sliding left and right on the guide rail; Mainly used for conducting experiments and production related to vapor deposition in universities, research centers, and manufacturing enterprises. Click to view more CVD furnaces!
Actual photo of 1200 ℃ dual temperature zone slide CVD tube furnace
1. The furnace body adopts an upper and lower "open close" structure, which is easy to take and place furnace tubes;
2. The furnace is designed with convection grids inside, which makes it easy for the airflow inside the furnace to form upward and downward convection circulation, which is beneficial for furnace temperature balance and uniform temperature field.
3. The entire furnace body adopts a double-layer inner liner structure with an air gap in the middle for isolation. Even if the furnace temperature reaches up to 1000 ℃, the surface of the furnace body can still be safely touched without a feeling of scalding.
4. The heating elements in the furnace are evenly distributed in a circular axial direction, and the heating elements have been embedded and solidified. The thermal energy radiation during heating is uniform and mild.
5. The gas flow rate is accurately measured and controlled using a touchscreen 6-channel mass flow controller.
6. The high vacuum molecular pump unit can quickly replace gas in the furnace tube and achieve high vacuum inside the tube.
Product name | Dual temperature zone slide type CVD System |
1200 double temperature zone slide tube furnace | |
Chamber type | open-type |
Furnace sliding | The material can be quickly cooled and heated by sliding left and right on the guide rail. |
Chamber material | Alumina refractory fiber |
Heating element | Molybdenum heating wire |
Max.temperature | 1200℃ |
Working temperature | ≤1100℃ |
Heating rate | ≤20℃(Suggest:15℃/min) |
Heating zone | Double zone |
Total length of temperature zone | 200+200mm(Can be customized according to customer needs) |
Furnace tube material | High purity quartz |
Furnace tube diameter | 60mm(Can be customized according to customer needs) |
Sealing method |
A set of stainless steel vacuum flanges (including sealing silicone rings). One end uses a quick-connect flange to facilitate the entry and exit of materials, and reserves air inlets and air outlets. |
control mode | Multi-stage intelligent PID program temperature control |
Temperature measuring element | N type thermocouple |
Call the police | With overtemperature and disconnection alarm |
Air supply system PT-6Z | |
Operating temperature | 5--45℃ |
Maximum air pressure | 3*106Pa |
gas channel |
Can connect to 6 gas sources at the same time The mass flow meter and gas mixing tank are installed in the mobile box |
flow meter | Mass flow meter (other ranges are optional and do not affect the price) |
Shut-off valve | Stainless steel material |
Gas connection pipe | stainless steel pipe |
Transaction process
After-sales Service
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.
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