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| Model | PT-PECVD | |
| Part I: Standard Parts | ||
|
Tube Furnace |
Display | LCD touch screen |
| Chamber | Split type and upper part can be opened | |
| Max. Temperature | 1200℃ for short time | |
| Continuous Woking Temp. | ≤1100℃ | |
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | |
| Temperature Zone | 400mm | |
| Heating Element | Resistance wire with Mo | |
| Thermocouple | K type | |
|
Temperature Control Accuracy |
±1℃ | |
|
Tube Size |
OD60mm x 100mm x 60mm Tube Length :1600 mm |
|
| Temperature Control | PID automatic control via SCR power control | |
| Heating curves | 30 steps programmable | |
| Power |
220V, 50 Hz, single phase (or according to your requirements) |
|
| Customized Function |
Rotary and tilt Tilt angle: 0-30° (suggestion:0-15°) Tube rotation speed: 0-10r/min Communicate Port Control the temperature, mass flow rate, rotating speed and vacuum pump by computer. |
|
|
Plasma RF Power supply |
Output Power | 5 -500W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability | |
| Reflection Power | 200W max. | |
| Matching | Automatic | |
| RF Output Port | 50 Ω, N-type, female | |
| Noise | <50 dB. | |
| Cooling | Air cooling. | |
| Power | 220V, 50Hz | |
Transaction process
After-sales Service
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.
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