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Model：PT-T1600-PECVD
Description：1600C Max Three-Zones PECVD Tube Furnace (80 mm OD) with Pre-Heater and Sliding Rail can put solid material in the heater for evaporation and mixing with the vapor phase.
| Pre-heating furnace |
 |
Small tube furnace with 200mm length single heating zone Max. temperature: 1600ºC 30 segment programmable temperature control The vapor goes through the heater first before getting in the RF Plasma generator. It can put solid material in the heater for evaporation and mixing with the vapor phase. Vacuum flange: included |
|
Tube Furnace |
Display |
LED |
| Optional LCD Touch Screen |
 |
|
| Chamber | Split type and upper part can be opened | |
| Limiting Temp. | 1600℃ | |
| Continuous Woking Temp. | ≤1500℃ | |
| Heating Rate | Suggestion: 0~10℃/min | |
| Temperature Zone |
200mm+200+200mm Two programmable precision digital temperature controllers with 30 segments. |
|
| Heating Element | MoSi2 heaters | |
| Thermocouple | B type | |
| Temperature Control Accuracy | ±1℃ | |
| Tube Size | 80mm OD x 3200 mm L | |
| Tube Material | Quartz Tube | |
| Temperature Control | PID automatic control via SCR power control | |
| Heating curves | 30 steps programmable | |
|
Vacuum Flange |
Stainless Steel vacuum flange with valve |
|
| Power | 380V, 50 Hz, three phases at max. 14KW | |
| Sliding | Manually | |
|
Plasma RF Power supply
 |
Output Power | 5 -300W adjustable with ± 1% stability |
| RF frequency | 13.56 MHz ±0.005% stability | |
| Reflection Power | 200W max. | |
| Matching | Automatic | |
| RF Output Port | 50 Ω, N-type, female | |
| Noise | <50 dB. | |
| Cooling | Air cooling. | |
| Power | 220V, 50Hz | |
|
Vacuum Pump |
Rotary Vane Vacuum Pump+molecular pump system |
Vacuum level:6*10-5torr The rotary vane vacuum pump and molecular pump will be designed into a cart with wheel.  |
Transaction process
After-sales Service
1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.
2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.
3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.
4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).
5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).
6.All the equipment has the CE certificate.
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