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How to choose a multi gas path CVD electric furnace?

Time:2024-11-08 10:14

When choosing a multi gas path CVD electric furnace, multiple factors need to be considered to ensure that the selected equipment can meet the specific needs of experiments or production. Let's take a look at what aspects to pay attention to when choosing a multi gas path CVD electric furnace!

Commonly used multi gas path CVD electric furnace (click on the image to view product details)
Commonly used multi gas path CVD electric furnace (click on the image to view product details)

Temperature range and accuracy:
Temperature range: Select a CVD electric furnace with an appropriate temperature range based on the high or low temperature environment required for the experiment. The common working temperature range of CVD electric furnaces is between 800 ℃ and 1600 ℃, and some equipment can even reach 1700 ℃ or higher.
Temperature accuracy: High precision temperature control is important for the reproducibility of experimental results. Therefore, electric furnaces with high-precision temperature control systems should be selected, such as equipment using PID automatic control, thyristor (thyristor) output power regulation, multi-stage programmable controllers, and other technologies.

Furnace tube size and heating zone:
Furnace tube size: Select the appropriate furnace tube size based on the size and shape of the experimental sample. The common outer diameters of furnace tubes include specifications such as Φ 60, Φ 80, and Φ 100, while the length is usually within 1000mm.
Heating zone and constant temperature zone: The heating zone determines the heating range inside the furnace tube, while the constant temperature zone determines the area of temperature uniformity. Choose an electric furnace with sufficient heating and constant temperature zones to ensure uniform heating of the experimental samples.

Gas supply system and mixing device:
Gas supply system: A multi gas path CVD electric furnace needs to be equipped with a good multi gas path gas supply system to achieve the mixing of two or more gases or vapors in a certain proportion and their introduction into the high-temperature furnace. The gas supply system should be equipped with multiple flow meters, such as float flow meters and mass flow meters, to accurately control the intake air volume.
Mixing device: Choose an electric furnace with an efficient mixing device to ensure the uniformity and stability of gas mixing. This is important for the accuracy and reproducibility of experimental results.

Vacuum requirement:
Choose a suitable vacuum system based on the required vacuum level and cleanliness for the experiment. Common vacuum systems include low vacuum systems and high vacuum systems, which can be achieved using devices such as molecular pumps or diffusion pumps to achieve the desired vacuum level. At the same time, electric furnaces equipped with vacuum gauges should be selected to monitor the vacuum status inside the furnace in real time.

Control system and operational convenience:
Choose an electric furnace with a good control system and human-machine interface, such as touch screen control, remote monitoring, etc., to improve the convenience and safety of operation. These functions help reduce operational difficulty and improve experimental efficiency.

Security performance:
Consider the safety performance of electric furnaces, such as overheat protection, leakage protection, emergency shutdown and other safety devices. These safety devices can take timely measures to protect the safety of laboratory personnel and equipment in case of equipment failure.

Brand and after-sales service:
Choose a reputable and reputable electric furnace manufacturer to ensure the quality and stability of the equipment. At the same time, understand the manufacturer's after-sales service policy, including support for installation and commissioning, technical training, maintenance, and other aspects. These services help ensure the long-term stable operation of equipment and reduce usage costs.

Commonly used multi temperature zone and multi gas path CVD electric furnace (click on the image to view product details)
Commonly used multi temperature zone and multi gas path CVD electric furnace (click on the image to view product details)

In general, when choosing a multi gas path CVD electric furnace, it is necessary to comprehensively consider multiple factors such as temperature range and accuracy, furnace tube size and heating zone, gas supply system and mixing device, vacuum requirements, control system and operational convenience, safety performance, as well as brand and after-sales service. By comprehensively evaluating these factors, equipment that meets experimental or production needs can be selected.Click to learn more CVD system furnaces! Or click on online customer service to learn more about product information!

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