PECVD (Plasma Enhanced Chemical Vapor Deposition) coating electric furnace is a device that uses plasma technology to achieve thin film deposition. It can deposit various types of thin films and is widely used in semiconductor, photovoltaic, optical, electronic and other fields. Let's take a detailed look at what types of films can be deposited on PECVD electric furnaces below!

Commonly used slide PECVD electric furnace (click on the image to view product details)

1. Insulation dielectric film
Silicon dioxide (SiO ₂)
Used as insulation layer, passivation layer or isolation layer in semiconductor devices, it has good electrical insulation and chemical stability.

Silicon nitride (Si ∝ N ₄)
As an insulation layer, passivation layer or anti reflection layer, it has high dielectric constant, good thermal stability and mechanical strength, and is commonly used in integrated circuits and photovoltaic cells.

Silicon oxynitride (SiON)
Combining the characteristics of SiO ₂ and Si ∝ N ₄, it is used to adjust the refractive index or as a transition layer, suitable for optical coatings and semiconductor devices.

2. Anti reflection and optical functional film
Silicon nitride (Si ∝ N ₄) anti reflection film
Reduce surface reflection in solar cells, improve light absorption efficiency, and have passivation effects to enhance battery performance.

Aluminum oxide (Al ₂ O3)
Used in optical or semiconductor devices as a high dielectric constant layer or protective layer to enhance the durability and optical performance of the device.

Magnesium fluoride (MgF ₂)
Anti reflective coatings commonly used in optical lenses or solar cells, with low refractive index and high transparency.

3. Conductive and semiconductor functional films
Indium tin oxide (ITO)
Used for transparent conductive electrodes, such as touch screens, liquid crystal displays, and solar cells, with high transparency and low resistivity.

Doped silicon thin film (such as n-type or p-type polycrystalline silicon)
The active layer used for the emitter of solar cells or semiconductor devices to regulate electrical performance.

Silicon carbide (SiC)
Used for high-temperature and high-frequency electronic devices, it has high hardness, high thermal conductivity, and good electrical performance.

4. Passivation and protective film
Hydrogenated silicon nitride (SiNx: H)
Passivating the surface of crystalline silicon in solar cells reduces carrier recombination and improves cell efficiency.

Silicon oxide (SiO ₂) passivation layer
Used for surface passivation of semiconductor devices, reducing interface state density and improving device performance.

Diamond like carbon (DLC)
High hardness, low friction coefficient, and good chemical stability, used as wear-resistant coatings for mechanical components or protective layers for electronic devices.

5. Special functional film
Low dielectric constant (Low-k) materials
Used as an interlayer dielectric for integrated circuits, reducing signal delay and power consumption, and improving chip performance.

High dielectric constant (High-k) materials
Such as HfO ₂, ZrO ₂, etc., are used to replace traditional SiO ₂ as the gate dielectric, improving the driving current and reliability of transistors.

Biocompatibility coating
Such as TiO ₂, SiO ₂, etc., used in medical devices or biosensors, have good biocompatibility and corrosion resistance.

The advantages of PECVD coating electric furnace
Low temperature deposition: suitable for temperature sensitive substrate materials, such as flexible substrates or organic materials.
High deposition rate: Plasma enhanced technology can greatly improve the growth rate of thin films.
High film quality: The deposited film has good uniformity, high density, and strong adhesion.
Process flexibility: The composition and properties of the film can be precisely controlled by adjusting parameters such as gas composition, power, and temperature.

PECVD electric furnace that can tilt and rotate (click on the image to view product details)

So PECVD has a wide range of applications in the field of coating. You can consult relevant technical personnel before purchasing to see if the PECVD electric furnace is suitable for your own process!Click to learn more PECVD devices! Or click on online customer service to learn more about product information!