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RTP Tube Furnace

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Description£ºIt is designed for annealing semiconductor wafer or solar cell.Selling Point: Can be customized according to your needs.Based on the above information,you can You can choose according to the RTP tube furnace image and the table parameters in detail, and then contact us to get the price you expect.Selling Point: Can be customized according to your needs.Based on the above information,you can choose according to the RTP tube furnace image and the table parameters in detail

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     RTP tube furnace is heated by halogen light around the processing tube with a max. heating rate of max. 300°C/min. 30 segment precision temperature controller with +/-1ºC accuracy is built into the furnace to allow for heating, dwelling, and cooling at various steps.

 Features of Rtp tube furnace :
(1). Great temperature uniformity.
(2) Over temperature protection and alarm.
(3) PID automatic control via SCR power control.
(4) Halogen heating element for fast heating.
(5) Sliding Chamber for fast cooling.


Technical parameters :
Limiting temperature 1200¡æ(max up to 1700)
Display LED
Structure Split and Rail Chamber
Temperature Zone Single
Temperature Control Accuracy ±1°C
Constant hot zone length 50mm (±2°C) ; 80mm (±3°C)
Tube Material Quartz Tube
Heating Element IR Lamps
Sealing Vacuum Flange
Temperature Control PID automatic control via SCR power control
Heating curves 30 steps programmable
Chamber material Alumina Fiber
Warranty One year limited warranty (Consumable parts such as heating elements are not covered by the warranty)

We have a wide range of different optional function furnace to meet different heating requirement, also we accept customer design furnace R&D working, please email us your specific requirement, we will recommend most reasonable choice for you, thanks!

 Transaction process


  After-sales Service


1.We provide one year warranty for our equipment (Except the quick-wear part),Equipment damage or malfunction during the guarantee period due to equipment quality reasons, all be free maintenance.After the warranty expires, still offer lifetime and high quality service.

2.In case of failure in the process of equipment used, our company will make a deal as soon as possible, to ensure the normal operation of equipment.

3.Our company provide free equipment operation training and simple troubleshooting and maintenance training.

4.My company's technical staff can provide door-to-door service (product installation, debugging, maintenance, technical advice and instructions, etc.).

5.Our company provides transport services, packaging are carried out in accordance with the safety standard packing.Random complete technical data (user manual, maintenance manuals, relevant materials and accessories, random tools, etc.).

6.All the equipment has the CE certificate.


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