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Common faults and solutions of RTP rapid annealing furnace

Time:2024-08-08 14:38

RTP rapid annealing furnace, as an efficient and precise heat treatment equipment, has a wide range of applications in fields such as semiconductors and solar cell substrates. However, during use, RTP rapid annealing furnaces may also experience some common malfunctions. Let's take a look at the faults and solutions that RTP rapid annealing furnace may encounter during use!

Commonly used RTP fast annealing furnace (click on the image to view product details)
Commonly used RTP fast annealing furnace (click on the image to view product details)

1. Common faults
Heating element damaged
Phenomenon: Uneven heating or partial areas not heated.
Reason: The heating element works for a long time and is susceptible to damage due to factors such as high temperature and oxidation.

Temperature control deviation
Phenomenon: The actual temperature does not match the set temperature, resulting in a significant deviation.
Reason: Temperature sensor malfunction, controller malfunction, furnace structure problem, or control system failure, etc.

Furnace cracking
Phenomenon: Cracks appear in the furnace, affecting the sealing and heating effect.
Reason: The furnace material has been working at high temperatures for a long time or has been damaged due to improper operation during use.

Decreased vacuum degree
Phenomenon: The vacuum degree inside the furnace cannot meet the requirements, which affects the quality of sample processing.
Reason: Poor sealing of the vacuum system, decreased performance of the pump unit, or pipeline blockage.

Electrical malfunction
Phenomenon: The device cannot start, the display screen is not showing or displaying abnormally.
Reason: Power line malfunction, controller malfunction, damaged display screen, etc.

Sliding RTP fast annealing furnace (click on the image to view product details)
Sliding RTP fast annealing furnace (click on the image to view product details)

2. Solution method
Heating element damaged
Solution: Use a thermal imager or infrared thermometer to check if the heating element temperature is uniform. If damage is found, replace the heating element with a qualified one in a timely manner.

Temperature control deviation
solve:
Check if the temperature sensor is working properly and replace it promptly if it is damaged.
Check if the controller is functioning properly. If there is a malfunction, repair or replace it according to the specific situation.
Check if the furnace structure is intact, and if there is any deformation or air leakage, make corresponding repairs.

Furnace cracking
solve:
After the furnace cracks, it should be immediately stopped from use and professional personnel should be contacted for repair or replacement.
Regularly inspect and maintain the furnace to avoid damage caused by long-term high-temperature work.

Decreased vacuum degree
solve:
Check the sealing of the vacuum system and promptly repair any leaks.
Check the performance of the pump unit, and if the performance decreases, maintenance or replacement is required.
Clean up pipeline blockages and keep the pipeline unobstructed.

Electrical malfunction
solve:
Check if the power circuit is connected properly, and repair any open or short circuits in a timely manner.
Check whether the controller and display screen are working properly, and repair or replace them accordingly if any faults occur.
Regularly inspect and maintain the electrical components to ensure stable and reliable electrical performance of the equipment.

Vacuum RTP rapid annealing furnace (click on the image to view product details)
Vacuum RTP rapid annealing furnace (click on the image to view product details)

3. Summary
RTP rapid annealing furnace may experience various malfunctions during use, but regular inspection and maintenance, as well as timely adoption of correct solutions, can effectively reduce the occurrence of malfunctions and extend the service life of the equipment. Meanwhile, it is recommended that users pay attention to operating standards and safety precautions during use to ensure the safe and stable operation of the equipment.Click to learn more tube furnaces! Or click on online customer service to learn more about product information!

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