CVD furnace, as a coating equipment, is widely used in industries such as semiconductors. So, what are the reasons for the inconsistency between the furnace temperature and the actual temperature during use? How to solve it? Let's take a look below!

A commonly used dual zone CVD furnace (click on the image to view product details)

1. Investigate the cause
Temperature sensor issue:
Check if the temperature sensor is damaged or aged, causing inaccurate measurements.
Check if the installation position of the temperature sensor is correct and if it is located in an area where the furnace temperature is evenly distributed.

Control system issues:
Check if the control system is functioning properly and if there are any software malfunctions or parameter settings errors.
Check if the PID parameter settings of the control system are reasonable. Improper PID parameter settings may lead to inaccurate temperature control.

Furnace environment issues:
Check whether there are impurities or carbon deposits in the furnace, which can affect the heat conduction and temperature distribution inside the furnace.
Check if the sealing of the furnace is good. Poor sealing may cause heat loss and affect the furnace temperature.

External factors:
Check whether the external ambient temperature has an impact on the furnace temperature, such as whether the ambient temperature is too high or too low, which may affect the control of furnace temperature.
Check if the power supply voltage is stable, as voltage fluctuations may also affect the accuracy of temperature control.

2. Solution
Replace or calibrate temperature sensor:
If the temperature sensor is found to be damaged or aged, it should be replaced with a new sensor in a timely manner.
Calibrate the new sensor to ensure its measurement accuracy.

Adjust control system parameters:
Adjust the PID parameters of the control system according to the actual situation to achieve better temperature control effect.
Check and correct the software settings of the control system to ensure that the parameter settings are correct and error free.

Cleaning the furnace environment:
Regularly clean the debris and carbon deposits in the furnace to maintain a clean environment.
Check and repair the sealing of the furnace to prevent heat loss.
Improving the external environment:
If the external environmental temperature affects the furnace temperature, corresponding measures can be taken to improve it, such as adding insulation layers.
Ensure stable power supply voltage, and install voltage regulators and other equipment if necessary.

Use other verification methods:
Some simple verification methods can be used to determine whether the furnace temperature and displayed temperature are consistent, such as using substances with known melting points (such as NaOH, anhydrous Na2CO3, etc.) for verification. Specific methods can refer to relevant literature or technical materials.

CVD furnace with slide track (click on the image to view product details)

3. Precautions
Before carrying out any maintenance or adjustment, be sure to cut off the power and wait for the furnace to cool down to a safe temperature.
When adjusting the parameters of the control system, it is necessary to gradually observe the temperature changes to avoid adjusting too much at once, which may cause temperature loss.
Regular maintenance and upkeep of CVD furnaces can extend their service life and improve their performance stability.

Through the above steps of investigation and resolution, the problem of inconsistent temperature between the CVD furnace chamber and the displayed temperature can be effectively solved. If the problem persists, it is recommended to contact professional technicians for further inspection and repair.Click to learn more CVD devices! Or click on online customer service to learn more about product information!