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Vacuum Tube Furnace - Knowledge

Time:2025-05-26 09:55

1. Definition and Overview
A vacuum tube furnace is a device that heats materials at high temperatures under vacuum or atmospheric protection conditions. Its core structure is a horizontally or vertically placed tubular furnace, which is evacuated to a high vacuum state through a vacuum system or filled with inert gases (such as argon and nitrogen) to form a protective atmosphere, avoiding materials from reacting with oxygen, water vapor, etc. at high temperatures. Vacuum tube furnaces are widely used in materials science, metallurgy, ceramics, electronics, chemical engineering and other fields, and are high-temperature equipment widely used in laboratories and industrial production.

The commonly used vacuum tube furnace for corundum tubes can reach up to 1400 ℃ (click on the image to view product details)
The commonly used vacuum tube furnace for corundum tubes can reach up to 1400 ℃ (click on the image to view product details)

2. Working principle
Vacuum system: The furnace pressure is pumped to a low vacuum (10 ⁻¹ Pa) to a high vacuum (10 ⁻³ Pa) range through mechanical pumps, diffusion pumps, or molecular pumps to eliminate adverse reactions such as oxidation and decarburization.
Heating system: Using heating elements such as resistance wires, silicon carbon rods, or silicon molybdenum rods, the furnace temperature is heated to a preset value (usually room temperature to 1600 ℃ or higher) through current heating.
Temperature control: Equipped with high-precision temperature controllers (such as PID controllers), programmable heating rate, insulation time, and cooling curve to ensure temperature uniformity and stability.
Atmosphere control: Inert gas or reducing gas (such as hydrogen) can be optionally introduced to protect the material surface or participate in chemical reactions.

3. Structural composition
Furnace body:
Furnace: High temperature resistant materials such as high-purity alumina fiber, zirconia fiber, or silicon carbide fiber are used to reduce heat loss.
Furnace tube: commonly used quartz tube, corundum tube (alumina tube) or metal tube (such as stainless steel), resistant to high temperature and corrosion.
Heating system: Heating elements are evenly distributed around the furnace tube to ensure temperature uniformity.
Vacuum system: mechanical pumps, vacuum valves, vacuum gauges, etc., to achieve a high vacuum environment.
Temperature control system: intelligent temperature controller, thermocouple or infrared thermometer, real-time monitoring and control of temperature.
Atmosphere system: gas pipelines, flow meters, valves, etc., controlling gas types and flow rates.
Security system: Over temperature protection, leakage protection, overvoltage protection, etc., to ensure the safe operation of equipment.

4. Main features
High vacuum degree: capable of achieving a high vacuum level of 10 ⁻ Pa, meeting the needs of high-end material preparation.
Temperature uniformity: The temperature gradient inside the furnace is small, ensuring uniform heating of the material.
Controllable atmosphere: Supports inert gases, reducing gases, or reactive gases to meet various process requirements.
Energy saving and efficient: using efficient insulation materials and heating elements to reduce energy consumption.
Easy to operate: equipped with a touch screen or computer control system, supporting program heating, data recording, and analysis.
Safe and reliable: Multiple security protection mechanisms to prevent equipment damage and personnel injury.

5. Application Fields
Materials Science:
Preparation of nano materials: such as the synthesis of nano powders, nanowires, and nano films.
High temperature sintering: High temperature sintering of ceramics, metal ceramics, and composite materials.
Heat treatment: Annealing, quenching, tempering, etc. of metal materials.

Semiconductors and Electronics:
Crystal growth: such as the growth of silicon single crystals and compound semiconductors.
Thin film deposition: Chemical Vapor Deposition (CVD), Plasma Chemical Vapor Deposition (PECVD), etc.
Device annealing: Annealing treatment of semiconductor devices and optoelectronic devices.

New energy:
Lithium battery materials: heat treatment of positive and negative electrode materials, carbon coating, etc.
Solar cells: Preparation of silicon-based, perovskite and other solar cells.

Catalysis and Chemical Engineering:
Catalyst preparation: synthesis of supported catalysts and nanocatalysts.
High temperature reactions: organic synthesis, pyrolysis reactions, etc.

Metallurgy and Powder Metallurgy:
Metal melting: melting of high-temperature alloys and refractory metals.
Powder metallurgy: sintering and densification of metal powders.

6. Operation and maintenance
Operation steps:
Place the sample: Place the material to be processed into the furnace tube, taking care not to block the gas channel.
Vacuum pumping: Close the furnace door, start the vacuum pump, and pump to the target vacuum degree.
Gas injection (optional): Introduce inert gas or reactive gas according to process requirements.
Program settings: Set the heating rate, insulation temperature, and time on the temperature controller.
Start heating: Press the start button, and the device will automatically run.
Cooling and Sampling: After heating, cool naturally or accelerate cooling by introducing gas, and take out the sample after the temperature drops to a safe range.

Maintenance and upkeep:
Regularly clean the furnace and furnace tubes to remove residues.
Check the oil level and quality of the vacuum pump, and regularly replace the vacuum pump oil.
Verify thermocouples and temperature controllers to ensure accurate temperature measurement.
Check whether the heating element is aging or damaged, and replace it in a timely manner.
Regularly inspect seals (such as O-rings) to ensure vacuum level.

7. Development Trends
High temperature: Develop vacuum tube furnaces with higher temperatures (such as above 1800 ℃) to meet the preparation needs of ultra-high temperature materials.
Intelligence: Integrating IoT technology to achieve remote monitoring, fault diagnosis, and data analysis.
Energy saving: Adopting new insulation materials and high-efficiency heating elements to reduce energy consumption.
Multifunctionality: Combining various technologies such as vacuum, atmosphere, and plasma to expand the application range.
Miniaturization: Develop miniaturized and portable vacuum tube furnaces to meet the needs of laboratories and small-scale production.

Rotating and tilting vacuum tube furnace (click on the image to view product details)
Rotating and tilting vacuum tube furnace (click on the image to view product details)

8. Summary
In general, as a commonly used heat treatment equipment in university laboratories, industrial and mining laboratories, vacuum tube furnaces can be selected by communicating with relevant technical personnel or business managers about the required parameter configurations, in order to produce vacuum tube furnaces that are suitable for one's needs!Click to learn more tube furnaces! Or click on online customer service to learn more about product information!

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