Vacuum CVD electric furnace, also known as chemical vapor deposition (CVD) tube furnace, has a wide range of applications in the fields of materials science and engineering. Let's take a look at the advantages of vacuum CVD electric furnace!

Vacuum atmosphere CVD electric furnace (click on the image to view product details)

1. Efficient and energy-saving
The vacuum CVD electric furnace adopts high-efficiency and energy-saving furnace materials, such as polycrystalline mullite fiber or alumina polycrystalline fiber materials, which have good insulation performance and can effectively reduce energy consumption.
The furnace body often adopts a double-layer furnace shell structure, with fans installed between the double-layer furnace shells to achieve rapid temperature rise and fall, and the surface temperature of the furnace shell is low, further improving energy utilization efficiency.

2. Accurate control of temperature and atmosphere
The vacuum CVD electric furnace is equipped with a precision temperature controller, which can achieve 30 or more heating and cooling steps with an accuracy of up to ± 1 ° C, ensuring the stability and repeatability of the temperature inside the furnace.
The atmosphere inside the furnace can be adjusted through precise gas flow control systems, such as manual float flow meters or high-precision mass flow meters, to meet the process requirements of different protective atmospheres.

3. Air tightness and high temperature resistance performance
Furnace tubes are often made of high-purity materials (such as high-purity quartz tubes and high-purity corundum tubes), and both ends are sealed with stainless steel high vacuum flanges to ensure airtightness and high temperature resistance.
The sealing flange adopts double ring sealing technology, effectively improving the air tightness at both ends of the furnace tube.

4. Multifunctionality
The vacuum CVD electric furnace can be used not only for material deposition, such as preparing thin films, nanoparticles, and other new materials, but also for various processes such as powder calcination, ceramic sintering, high-temperature experiments, and material processing.
In the semiconductor industry, CVD tube furnaces are used for processes such as thin film deposition, wafer cleaning, and surface treatment.
In other fields such as ceramics, metallurgy, electronics, glass, chemical engineering, machinery, refractory materials, special materials, building materials, etc., vacuum CVD electric furnaces are also widely used.

5. Convenient operation and practical structure
The gas path connection method of the vacuum CVD electric furnace adopts a quick connection flange structure, which simplifies the process of taking and placing materials. Only one clamp is needed to complete the gas path connection, which is convenient for operation.
The furnace material is made of polycrystalline molybdenum fiber vacuum adsorption, which allows the material to be heated simultaneously at different temperature ranges with a uniform temperature field.
Good air insulation technology combined with thermal induction technology, when the surface temperature of the furnace reaches a certain temperature, the exhaust fan will automatically start, rapidly cooling the surface of the furnace.

Touch screen vacuum CVD electric furnace (click on the image to view product details)

Overall, vacuum CVD electric furnaces have advantages such as high efficiency and energy saving, precise temperature and atmosphere control, airtightness and high temperature resistance, multifunctionality, as well as convenient operation and practical structure. They are important equipment commonly used in the fields of materials science and engineering.Click to learn more CVD system furnaces! Or click on online customer service to learn more about product information!