The application fields of tubular PECVD (plasma enhanced chemical vapor deposition) electric furnace are very wide, mainly reflected in the following aspects:

Commonly used tubular PECVD electric furnace (click on the image to view product details)

Semiconductor industry: In the semiconductor manufacturing process, tubular PECVD electric furnaces can be used to manufacture integrated circuits. By precisely controlling process parameters, high-quality thin films such as silicon dioxide (SiO2) and silicon nitride (Si3N4) are deposited on the substrate surface to isolate multiple conductive layers and capacitors.

Solar cell manufacturing: Tube PECVD electric furnace is a deposition technology for manufacturing solar cells and photovoltaic modules, which can uniformly deposit thin films on wide surface areas such as solar panels or optical glass. By adjusting plasma parameters, the refractive quality of optical coatings can be finely controlled, thereby improving the photoelectric conversion efficiency of solar cells.

Optical coating: This technology is widely used in the production of coatings with specific optical properties, such as anti reflective coatings, anti reflective coatings, etc. It can be used for optical products such as sunglasses, colored optical equipment, and photometers to improve the optical performance and service life of the products.

Preparation of Nanofilm: Tubular PECVD polymerized nanofilm has the advantages of uniform film thickness, high temperature resistance, wear resistance, and high purity. It can be used to produce internal circuit boards for consumer electronics products such as smartphones, TWS earphones, laptops, etc., providing protection functions such as corrosion and moisture resistance. Meanwhile, it can also be used to prepare high-quality films such as diamond films, hard films, and carbon nanotubes (CNT).

In the field of new energy vehicles, PECVD polymer nano films have electronic protection properties and can be used to protect key components such as central control systems, boost charging systems, and BMS systems in new energy vehicles, improving system stability and safety.

Medical implants: Dense inert coatings produced through PECVD technology have excellent biocompatibility and corrosion resistance, and can be used for surface modification of medical implants, such as artificial joints, dental implants, etc., to improve the service life of implants and patient comfort.

Wear resistant coating: Diamond like carbon (DLC) and other wear-resistant coatings can be deposited on the surface of materials through PECVD technology, significantly improving the wear resistance and low friction of materials. They have broad application prospects in mechanical parts, bearings, sliding components and other fields.

Food packaging: PECVD technology can also be used to produce packaging materials with excellent barrier properties, such as potato chip bags and other food packaging materials, to protect food from external pollutants and moisture.

Industrial control: In harsh industrial environments, PECVD nano coating technology can be used to protect components and motherboards from moisture, chemicals, and other corrosion, improving product stability and reliability.

Customized slide tube PECVD electric furnace (click on the image to view product details)

In addition, the tubular PECVD electric furnace also has many advantages such as high film deposition rate, high area uniformity, high concentration and precision, high process stability, high adhesion, multifunctionality, intelligent control, safety and reliability. These advantages further expand its application fields and make it play an important role in multiple industries. With the continuous advancement of technology and the expansion of application fields, the market prospects of tubular PECVD electric furnaces will become even broader.Click to learn more PECVD devices! Or click on online customer service to learn more about product information!