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When choosing a multi zone CVD high-temperature coating tube furnace, multiple key factors need to be considered to ensure that the selected equipment can meet specific process requirements. Let's take a detailed look at the precautions when choosing!
Temperature range and accuracy:
Select a tube furnace with a suitable temperature range based on the high temperature environment required for the coating process. The common working temperature range of CVD tube furnaces is between 800 ℃ and 1600 ℃, and some high-end equipment can even reach 1700 ℃. High precision temperature control is important for the stability and repeatability of coating quality. Therefore, a tube furnace with a high-precision temperature control system should be selected, such as equipment using PID automatic control, thyristor (thyristor) output power regulation, and multi-stage programmable controllers.
Furnace tube size and shape:
Choose the appropriate furnace tube size based on the size and shape of the coating sample. The common outer diameters of furnace tubes include Φ 60, Φ 80, Φ 100, etc., and the length is usually within 1000mm.
For samples with specific shapes or large sizes, it may be necessary to customize furnace tubes with special shapes to meet process requirements.
Heating zone and constant temperature zone:
The heating zone determines the heating range inside the furnace tube, while the constant temperature zone determines the area of temperature uniformity. The multi temperature zone design allows different temperatures to be set in different areas of the furnace tube to meet the requirements of complex coating processes.
Choose a tube furnace with sufficient heating and constant temperature zones to ensure uniform heating and high-quality coating effect of the coated samples.
Gas supply system:
The CVD coating process requires precise control of the flow rate and proportion of reaction gases. Therefore, a tubular furnace equipped with a good multi gas supply system should be selected to achieve the mixing of two or more gases or vapors in a certain proportion and their introduction into the high-temperature furnace.
The gas supply system should be equipped with multiple flow meters, such as float flow meters and mass flow meters, to accurately control the intake air volume. Meanwhile, the efficiency of the gas mixing device is also an important factor in ensuring the uniformity and stability of gas mixing.
Vacuum system:
Choose a suitable vacuum system based on the required vacuum level and cleanliness for the coating process. Common vacuum systems include low vacuum systems and high vacuum systems, such as rotary vane pumps, Roots pumps, molecular pumps, diffusion pumps, etc.
Choose a tube furnace equipped with a vacuum gauge to monitor the vacuum status in real-time, ensuring the stability and controllability of the coating process.
Control system and operating interface:
Choose a tube furnace with a good control system and human-machine interface, such as touch screen control, remote monitoring, etc., to improve the convenience and safety of operation.
The control system should have a high level of automation and intelligence, and be able to achieve precise control and data recording of the coating process.
Security performance:
Consider the safety performance of tube furnaces, such as overheat protection, leakage protection, emergency shutdown and other safety devices. These safety devices can take timely measures to protect the safety of operators and equipment in case of equipment failure or abnormal situations.
Brand and after-sales service:
Choose a tube furnace manufacturer with a good reputation to ensure the quality and stability of the equipment.
Understand the manufacturer's after-sales service policy, including support for installation, commissioning, technical training, maintenance, and other aspects. Good after-sales service can ensure timely maintenance and upkeep of equipment during use, prolong its service life, and reduce operating costs.
Customized Three Temperature Zone CVD Tube Furnace (Click on the image to view product details)
In general, when choosing a multi temperature zone CVD high-temperature coating tube furnace, it is necessary to comprehensively consider multiple factors such as temperature range and accuracy, furnace tube size and shape, heating zone and constant temperature zone, gas supply system, vacuum system, control system and operation interface, safety performance, as well as brand and after-sales service. By comprehensively evaluating these factors and combining them with specific process requirements, a more suitable tubular furnace equipment can be selected.Click to learn more CVD devices! Or click on online customer service to learn more about product information!
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