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CVD furnace (chemical vapor deposition furnace) needs to pay attention to multiple aspects during use to ensure the normal operation of equipment, the success of experiments, and the safety of operators. Let's take a look at what to pay attention to when using a CVD furnace!
Commonly used CVD furnaces (click on the image to view product details)
1. Equipment operation and safety
Oven treatment:
After the furnace is first used or not used for a long time, it needs to be baked. This usually involves baking at a lower temperature (such as 120 ℃) for a period of time, then gradually increasing to a higher temperature (such as 300 ℃) for further baking to avoid furnace cracking.
Temperature control:
Set a reasonable heating rate, especially in the low temperature range, to avoid rapid heating that may cause spraying or contamination of the furnace tube.
Regularly check the electrical connections of the temperature control system to ensure good contact, especially the connection points of the heating elements.
Be careful not to exceed the rated furnace temperature to prevent damage to heating elements and furnace lining.
Safe operation:
Comply with operating procedures and safety regulations to ensure that the equipment operates in the correct state.
It is prohibited to directly pour various liquids and dissolve metals into the furnace to maintain its cleanliness.
When carrying out operations such as picking up and delivering materials, avoid doing so when the furnace tube temperature is above 100 ℃ to prevent burns or damage to the materials.
2. Maintenance and upkeep
Regular inspection:
Regularly check the working status of the heating element and replace it if necessary.
Check the connection and operating status of components such as the air circulation system and thermocouples to ensure normal operation.
Cleaning equipment:
Regularly clean the equipment, remove dust and impurities, and maintain its cleanliness and heat dissipation effect.
Tighten screws:
Check and tighten the screws and connectors on the equipment to prevent malfunctions or accidents caused by looseness.
Customized dual furnace slide CVD furnace (click on the image to view product details)
3. Special case handling
Alarm information:
When an alarm message appears on the device, troubleshooting and handling should be carried out by referring to the troubleshooting section in the device operation manual based on the alarm content.
Abnormal situation:
If abnormal sounds, odors, or temperature fluctuations are found in the equipment, it should be immediately stopped and the cause identified.
4. Other precautions
Professional training:
Provide professional training to operators to enhance their understanding and operational skills of the equipment.
Usage record:
Establish equipment usage records, recording temperature, time, materials, and other information for each use, in order to facilitate subsequent analysis and maintenance.
Stable power supply:
Ensure stable power supply voltage of the equipment and avoid damage to heating elements caused by voltage fluctuations.
Customized large diameter CVD furnace (click on the image to view product details)
In summary, CVD furnaces require attention to equipment operation and safety, maintenance and upkeep, as well as handling of special situations during use. By strictly adhering to operating procedures and safety regulations, regularly maintaining and servicing equipment, and promptly handling abnormal situations, the normal operation of CVD furnaces and the success of experiments can be ensured.Click to learn more CVD devices! Or click on online customer service to learn more about product information!
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